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Silicon Substrate Integrated Tuneable Ferroelectric Devices for Microwave Applications

S. Gevorgian
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Sweden

A. Vorobiev
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Sweden

D. Kuylenstierna
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Sweden

P. Rundqvist
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Sweden

S. Abadei
Department of Microtechnology and Nanoscience, Chalmers University of Technology, Sweden

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Ingår i: GigaHertz 2003. Proceedings from the Seventh Symposium

Linköping Electronic Conference Proceedings 8:20, s.

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Publicerad: 2003-11-06

ISBN:

ISSN: 1650-3686 (tryckt), 1650-3740 (online)

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